D212 D214壓力鈍感質(zhì)量流量計(jì)

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產(chǎn)品簡介

概要高穩(wěn)定性的質(zhì)量流量計(jì)－氣體流量控制不受上流和下流端壓力變化的影響

詳細(xì)介紹

概要

高穩(wěn)定性的質(zhì)量流量計(jì)－氣體流量控制不受上流和下流端壓力變化的影響。不同壓力感測，采用壓力鈍感模式

特征

采用不同壓力感測即鈍感模式
縮小氣體柜的體積（不再需要壓力傳感器，調(diào)壓閥和過濾器）
流量控制量程范圍廠
精度高
提高產(chǎn)能－可以提供標(biāo)準(zhǔn)流量給半導(dǎo)體制程。

規(guī)格

	D212
Maximum Full-Scale (N2)	10 / 20 / 30 / 40sccm		50sccm ~ 10slm
Operating Inlet Pressure	14kPa (g) ~ 350kPa (g)		250kPa(g) ~ 350kPa(g)
Maximum Outlet Pressure	≤13.3kPa (a)	≤53.3kPa (a)	≤13.3kPa(a)	≤53.3kPa(a)
Accuracy under Digital mode (per SEMI Standard E56-1296)	±1% S.P. (35 ~ 99%) ±0.35% F.S. (2.5 ~ 35%)	±1% S.P. ( 50 ~ 99%) ±0.5% F.S. (30 ~ 50%)	±1% S.P. ( 5 ~ 99%) ±0.05% F.S. (0.5 ~ 5%)	±1% S.P. ( 10 ~ 99%) ±0.1% F.S. (2 ~ 10%)
Control Range under Digital mode (% F.S.)	2.5% ~ 99%	30 ~ 99%	0.5 ~ 99%	2 ~ 99%
Recommended Re-Zero Term	once/ year
Valve Type (PIEZO)	Normally Close
Linearity	±0.5% F.S.
Repeatability	±0.3% S.P. ( 10~99%) ±0.03% F.S. ( <10%)
Response Time	800 msec.
Proof Pressure	500kPa(g)
Burst Pressure	1MPa(g)
Leak Integrity	<5×10^-12 Pa·m³/s (He)
Wetted Materials	SUS-316L , INCONEL
Operating Temperature	15 ~ 45°C
Flow Rate Setting Signal	0 ~ 5VDC or RS485 F-NET Protocol
Flow Rate Output Signal	0 ~ 5VDC or RS485 F-NET Protocol
Power Requirement	± 15V ± 5%, 150 mA
Fittings	1.125inch width 1/4VCR , C-seal , W-seal
Installation Orientation	Attitude Insensitive

	D214
Maximum Full-Scale (N2)	10 / 20 / 30 / 40sccm		50sccm ~ 10slm
Operating Inlet Pressure	14kPa (g) ~ 350kPa (g)		250kPa(g) ~ 350kPa(g)
Maximum Outlet Pressure	≤13.3kPa (a)	≤53.3kPa (a)	≤13.3kPa(a)	≤53.3kPa(a)
Accuracy under Digital mode (per SEMI Standard E56-1296)	±1% S.P. (35 ~ 99%) ±0.35% F.S. (2.5 ~ 35%)	±1% S.P. ( 50 ~ 99%) ±0.5% F.S. (30 ~ 50%)	±1% S.P. ( 5 ~ 99%) ±0.05% F.S. (0.5 ~ 5%)	±1% S.P. ( 10 ~ 99%) ±0.1% F.S. (2 ~ 10%)
Control Range under Digital mode	2.5% ~ 99% F.S.	30 ~ 99% F.S.	0.5 ~ 99% F.S.	2 ~ 99% F.S.
Recommended Re-Zero Term	once/ year
Valve Type (PIEZO)	Normally Close
Linearity	±0.5% F.S.
Repeatability	±0.3% S.P. ( 10~99%) ±0.03% F.S. ( <10%)
Response Time	800 msec.
Proof Pressure	500kPa(g)
Burst Pressure	1MPa(g)
Leak Integrity	<5×10 -12 Pa·m 3 /s (He)
Wetted Materials	SUS-316L , INCONEL
Operating Temperature	15 ~ 45°C
Flow Rate Setting Signal	Device Net
Flow Rate Output Signal	Device Net
Power Requirement	11~25VDC 4VA
Fittings	1.125inch width 1/4VCR , C-seal , W-seal
Installation Orientation	Attitude Insensitive
NOTE
There are special variations for low inlet pressure condition. Please contact our local office if you have request / any questions about it.

商鋪：http://23133.cn/st54890/

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